Projection exposure apparatus and device manufacturing method

Details Projection exposure apparatus and device manufacturing method Projection exposure apparatus and device manufacturing method

1997-10-28

2000-03-21

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742, G03B 2754

Patent

active

060408944

ABSTRACT:
A projection exposure apparatus includes an illumination optical system for illuminating a mask with light from a light source, a projection optical system for projecting an image of a pattern of the mask being illuminated, the projection optical system having a pupil plane, a holding member for holding a substrate for receiving the image of the pattern, and a light detector for receiving light from the light source, passed through the projection optical system, wherein a light intensity distribution on the pupil plane is detectable on the basis of an output of the light detector, and wherein the light intensity distribution on the pupil plane can be adjusted as desired by adjusting the position of the light source on the basis of the detected light intensity distribution.

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patent: 5661546 (1997-08-01), Taniguchi
patent: 5684567 (1997-11-01), Shiozawa
patent: 5719617 (1998-02-01), Takahashi
patent: 5726739 (1998-03-01), Hayata

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