Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1988-01-25

1989-08-01

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2772

Patent

active

048537560

ABSTRACT:
A projection exposure apparatus includes a projection lens system for projecting a pattern of an original upon a workpiece, an illumination optical system for illuminating the original with a light having a predetermined central wavelength, and a bandwidth changing arrangement effective to change the bandwidth of the light irradiating the original.

REFERENCES:
patent: 4351608 (1982-09-01), Coote et al.
patent: 4653903 (1987-03-01), Torigoe et al.
patent: 4789222 (1988-12-01), Ota et al.

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