Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1992-04-15

1994-05-03

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

356400, 356152, G03B 2742

Patent

active

053091973

ABSTRACT:
A projection exposure apparatus includes a projection lens system for projecting an image of a pattern of an original on a substrate having a photosensitive layer, by using a sensitizing beam; a first detection optical system for detecting a mark of the substrate through the projection lens system and with a first non-sensitizing beam, the first detection optical system producing first information related to the position of the mark; a second detection optical system for detecting the mark of the substrate without the projection lens system and with a second nonsensitizing beam having a bandwidth broader than that of the first non-sensitizing beam, the second detection optical system producing second information related to the position of the mark; and a detector for detecting an error included in the first information, by using the first and second information.

REFERENCES:
patent: 4780615 (1988-10-01), Suzuki
patent: 4875076 (1989-10-01), Torigoe
patent: 4901109 (1990-02-01), Mitome et al.
patent: 4962318 (1990-10-01), Nishi

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