Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1997-02-27

1999-02-16

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, G03B 2742

Patent

active

058726187

ABSTRACT:
A is a projection exposure apparatus has a light sending optical system exhibiting a high degree of freedom of light sending. The light sending optical system comprises a light introducing system for introducing light beams from a predetermined light source into a substrate stage, and a light irradiating system for irradiating a predetermined area with the light beams introduced into the substrate stage by the light introducing system. The light introducing system and the light irradiating system are mechanically separated but optically connectable only when the substrate stage is in a specified positional relationship with respect to the projection optical system.

REFERENCES:
patent: 4829193 (1989-05-01), Nishi
patent: 4853745 (1989-08-01), Kamiya et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5243195 (1993-09-01), Nishi

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