Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1988-06-24

1989-03-07

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 77, G03B 2742

Patent

active

048110558

ABSTRACT:
A projection exposure apparatus for projecting a pattern of a mask onto a wafer, wherein the wavelength of light irradiating the mask is made adjustable to change the state of image formation, such as the imaging magnification, focus, etc., with respect to the mask pattern projected onto the wafer.

REFERENCES:
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4395117 (1983-07-01), Suzuki
patent: 4538914 (1985-09-01), Yomoda et al.
patent: 4703116 (1987-10-01), Bruning
Article "Square Blue Laser" by Jim Schefter, Popular Science, May, 1983.

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