Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1988-06-24
1989-03-07
Hayes, Monroe H.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, 355 77, G03B 2742
Patent
active
048110558
ABSTRACT:
A projection exposure apparatus for projecting a pattern of a mask onto a wafer, wherein the wavelength of light irradiating the mask is made adjustable to change the state of image formation, such as the imaging magnification, focus, etc., with respect to the mask pattern projected onto the wafer.
REFERENCES:
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4395117 (1983-07-01), Suzuki
patent: 4538914 (1985-09-01), Yomoda et al.
patent: 4703116 (1987-10-01), Bruning
Article "Square Blue Laser" by Jim Schefter, Popular Science, May, 1983.
Canon Kabushiki Kaisha
Hayes Monroe H.
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