Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1985-03-13

1985-12-31

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 45, 355 53, 356400, G03B 2752, G03B 2770

Patent

active

045617732

ABSTRACT:
In an apparatus wherein a first object having an information pattern and a second object for recording the information pattern thereon are aligned through a projection optical system and thereafter exposure is effected through the projection optical system, particularly, an apparatus wherein the position of the second object is changed and a plurality of exposures are effected, light for alignment and light for exposure differ in wavelength from each other and the relative positional relation among the first object, the second object and the projection optical system is made to differ during alignment and during exposure.

REFERENCES:
patent: 3542469 (1970-11-01), Hennings
patent: 4097142 (1978-06-01), Moutou et al.
patent: 4140392 (1979-02-01), Lacombat et al.
patent: 4153371 (1979-05-01), Koizumi et al.
patent: 4295735 (1981-10-01), Lacombat et al.
patent: 4422755 (1983-12-01), Phillips
patent: 4437758 (1984-03-01), Suzuki
patent: 4452526 (1984-06-01), Johannsmeier et al.
patent: 4464030 (1984-08-01), Gale et al.
patent: 4473293 (1984-09-01), Phillips
patent: 4492459 (1985-01-01), Omata

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