Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1992-07-31

1994-04-05

Will, Thomas B.

Optics: image projectors

Light shield, mask, hood, or diaphragm

353122, 355 71, G03B 2772

Patent

active

053009673

ABSTRACT:
A projection exposure apparatus includes a light source; an aperture member having openings for shaping light beams emitted from the light source and having a shielding member formed into a uniform pattern over the entire area of the openings in order to reduce the area of the openings; a light condensing lens for irradiating light beams transmitted through the opening of the aperture member onto a reticule; and a projection lens for condensing light beams transmitted through the reticule onto the surface of a wafer.

REFERENCES:
patent: 3591274 (1971-07-01), Donald
patent: 4512657 (1985-04-01), Sakato
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5144362 (1992-09-01), Kamon
patent: 5191374 (1993-03-01), Hazama et al.

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