Photocopying – Projection printing and copying cameras – Focus or magnification control
Patent
1995-02-09
1997-03-11
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Focus or magnification control
355 53, H01L 2130
Patent
active
056106840
ABSTRACT:
A projection exposure apparatus having an illuminating optical system for irradiating a mask having a pattern with illuminating light for exposure, and a projection optical system which is composed of a plurality of optical elements and arranged to take in light emanating from the pattern of the mask and to project an image of the pattern on a photosensitive substrate with predetermined image-forming characteristics. The projection exposure apparatus is provided with a movable retaining member for causing at least one of a plurality of lens elements constituting the projection optical system to move relative to the entire projection optical system in accordance with exchange, loading or unloading of an optical corrector plate, e.g., a pupil filter, which is disposed on a Fourier transform plane of the projection optical system.
REFERENCES:
patent: 4853756 (1989-08-01), Matsuki
patent: 4936665 (1990-06-01), Whitney
patent: 5117255 (1992-05-01), Shiraishi
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5426521 (1995-06-01), Chen et al.
Resume Distributed in the Applied Physics Association, Items 29A-ZD-8 and 9, pp. 1-3, Spring, 1991.
"Research on Imaging Capability and Improved Procedure Thereof in Optical System", Government Machinery Report No. 40, Jan., 1961.
Resume Distributed in the Applied Physics Association, Item 30p-NA-5, Spring 1992.
Resume Distributed in the Applied Physics Association, Item 12a-ZF-7, Autumn 1991.
Grimley Arthur T.
Lane David A.
Nikon Corporation
LandOfFree
Projection exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Projection exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-447348