Photocopying – Projection printing and copying cameras – Plural
Patent
1995-10-25
1996-12-10
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Plural
356401, 356363, 356375, 250548, G01N 2186, G01B 1100
Patent
active
055836097
ABSTRACT:
A projection exposure apparatus includes an illumination system for illuminating a mask, on which a pattern to be transferred is formed, with exposure light, a projection optical system for imaging and projecting the pattern on the mask onto a photosensitive substrate, beam radiation means for radiating an alignment beam with a wavelength different from the wavelength of the exposure light toward a first grating mark formed on the mask and a transparent portion near the first grating mark, and radiating the alignment beam onto a second grating mark formed on the photosensitive substrate via the transparent portion and the projection optical system, the beam radiation means having a four-beam generation member for generating two first alignment beams which cross each other on the first grating mark, and two second alignment beams which cross each other in a space separated by a predetermined distance from the surface of the mask.
REFERENCES:
patent: 4777374 (1988-10-01), Nakata et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 5204535 (1993-04-01), Mizutani
patent: 5214489 (1993-05-01), Mizutani et al.
patent: 5340992 (1994-08-01), Matsugu et al.
patent: 5483348 (1996-01-01), Komatsu et al.
patent: 5489986 (1996-02-01), Magome et al.
Kiuchi Tohru
Mizutani Hideo
Grimley Arthur T.
Kerner Herbert V.
Nikon Corporation
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