Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1988-06-24
1990-12-11
Hix, L. T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, G03B 2742, G03B 2754
Patent
active
049774263
ABSTRACT:
A projection exposure apparatus for projecting, through a refracting optical system, a pattern formed on an original such as a mask or reticle onto a wafer. The projection exposure apparatus includes a light source for providing an excimer laser beam to illuminate the original. The refracting optical system includes a plurality of lenses each of which is made of fused silica (SiO.sub.2) or calcium fluoride (CaF.sub.2).
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Canon Kabushiki Kaisha
Hix L. T,.
Rutledge D.
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