Projection exposure apparatus

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S053000, C355S057000, C359S726000

Reexamination Certificate

active

07038761

ABSTRACT:
An exposure apparatus includes a projection optical system of catadioptric type, and an optical element disposed on a reciprocating light path of the projection optical system, the optical element being movable to correct at least one of spherical aberration, astigmatism, and curvature of field of the projection optical system.

REFERENCES:
patent: 5311362 (1994-05-01), Matsumoto et al.
patent: 5537260 (1996-07-01), Williamson
patent: 5583696 (1996-12-01), Takahashi
patent: 5729331 (1998-03-01), Tanaka et al.
patent: 5835275 (1998-11-01), Takahashi et al.
patent: 5835284 (1998-11-01), Takahashi et al.
patent: 6249382 (2001-06-01), Komatsuda
patent: 6366341 (2002-04-01), Shirato et al.
patent: 2002/0012107 (2002-01-01), Suzuki
patent: 1 039 509 (1998-04-01), None
patent: 0 961 149 (1999-05-01), None
patent: 0 961 149 (1999-12-01), None
patent: 1 039 509 (2000-09-01), None
patent: 6-181162 (1994-06-01), None
patent: 6-300973 (1994-10-01), None
patent: 10-10431 (1998-01-01), None
patent: 10-20195 (1998-01-01), None
patent: WO 98/48451 (1998-10-01), None
European Search Report dated Aug. 19, 2003, issued in corresponding European patent appln. No. 01 30 1632, forwarded in a Communication dated Aug. 27, 2003.
Communication pursuant to Article 96(2) dated Dec. 9, 2004, from the European Patent Office issued in corresponding European patent application No. 01 301 632.4.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Projection exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3583387

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.