Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

2005-08-02

2005-08-02

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S052000, C355S067000

Reexamination Certificate

active

06924881

ABSTRACT:
A projection exposure apparatus includes an illumination optical system for illuminating a pattern formed on a first object, with light, a projection optical system for projecting the pattern of the first object, illuminated by the illumination optical system, onto a second object for exposure of the same with the pattern, a main system including the illumination optical system and the projection optical system, and an interferometer for use in measurement of an optical characteristic of the projection optical system and being mounted on the main system.

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patent: 5898501 (1999-04-01), Suzuki et al.
patent: 5995263 (1999-11-01), Tokuda et al.
patent: 5996799 (1999-12-01), Garreth et al.
patent: 6278514 (2001-08-01), Ohsaki
patent: 6281966 (2001-08-01), Kenmoku

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