Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-03-25
1998-04-07
Mathews, A. A.
Photocopying
Projection printing and copying cameras
Step and repeat
356400, 25055937, 355 55, G03B 2753
Patent
active
057370630
ABSTRACT:
Disclosed is a projection exposure apparatus which is able to realize stabilized focusing control which presents highly followable performances for the photosensitive substrate with few irregularities and will work without failure even for a photosensitive substrate having rough irregularities. A determining section determines whether the velocity instructions data obtained by a difference between a detected position of the substrate and a target position and a difference between the detected tilt of the substarate and a target tilt falls within respective predetermined allowable ranges. During the affirmative judgment by the determining section, a controller performs focusing and leveling control with high precision. When the determining section makes a negative judgment, the controller effects focusing control with the tilt of the wafer kept at constant.
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Mathews A. A.
Nikon Corporation
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