Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1996-03-25

1998-04-07

Mathews, A. A.

Photocopying

Projection printing and copying cameras

Step and repeat

356400, 25055937, 355 55, G03B 2753

Patent

active

057370630

ABSTRACT:
Disclosed is a projection exposure apparatus which is able to realize stabilized focusing control which presents highly followable performances for the photosensitive substrate with few irregularities and will work without failure even for a photosensitive substrate having rough irregularities. A determining section determines whether the velocity instructions data obtained by a difference between a detected position of the substrate and a target position and a difference between the detected tilt of the substarate and a target tilt falls within respective predetermined allowable ranges. During the affirmative judgment by the determining section, a controller performs focusing and leveling control with high precision. When the determining section makes a negative judgment, the controller effects focusing control with the tilt of the wafer kept at constant.

REFERENCES:
patent: 5194893 (1993-03-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5502313 (1996-03-01), Nakamura et al.
patent: 5510892 (1996-04-01), Mizutani et al.
patent: 5539497 (1996-07-01), Nishi
patent: 5569930 (1996-10-01), Imai
patent: 5602400 (1997-02-01), Kawashima
patent: 5654553 (1997-08-01), Kawakubo et al.
patent: 5659384 (1997-08-01), Ina

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