Projection encoder with moving side gratings and fixed side...

Details Projection encoder with moving side gratings and fixed side... Projection encoder with moving side gratings and fixed side...

2006-05-30

2006-05-30

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S231160

Reexamination Certificate

active

07053361

ABSTRACT:
A projection linear encoder has an SOQ substrate formed with transmission gratings and grid-like photodiode groups, and a reflecting grating plate with reflecting gratings that are formed facing thereto. A light-blocking film composed of a metal thin film or the like is formed on a surface of a glass substrate of the SOQ substrate, and the transmission gratings are formed by patterning the light-blocking film. The photodiodes are integrally formed by epitaxial growth on the silicon layer of the SOQ substrate. Transmission gratings with high mechanical strength can be formed inexpensively in comparison with cases in which through holes are formed by etching a silicon substrate to manufacture transmission gratings.

REFERENCES:
patent: 6528779 (2003-03-01), Franz et al.
patent: 2000-321097 (2000-11-01), None

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