Projection aligner

Details Projection aligner Projection aligner

1991-11-12

1992-09-01

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, G03B 2742

Patent

active

051443627

ABSTRACT:
A projection aligner includes a light source, a condenser lens system for directing light from the light source onto a mask on which a circuit pattern is formed, a projecting lens system for collecting on the surface of a wafer the light transmitted through the mask, and a pupillary member disposed on a pupillary surface of the projecting lens system. The pupillary member includes at least one transmitting zone for transmitting the light transmitted through the mask including a phase shift member for producing a predetermined phase shift in light transmitted through part of the transmitting zone.

REFERENCES:
patent: 3157087 (1964-11-01), Kallenberg
patent: 3892482 (1975-07-01), Weisglass
patent: 4257086 (1981-03-01), Gulliksen
patent: 4816876 (1989-03-01), Pryor
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 4988188 (1991-01-01), Ohta

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