Projecting exposure apparatus

Details Projecting exposure apparatus Projecting exposure apparatus

2005-08-16

2005-08-16

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

06930761

ABSTRACT:
A spatial light modulator performs spatial light modulation of light produced by a light source. An image-side telecentric image forming optical system forms an image of a two-dimensional pattern of the light, which has been obtained from the spatial light modulation, on a photosensitive material. An axial air separation adjusting section is located between the image forming optical system and the photosensitive material. The axial air separation adjusting section alters an axial air separation between the image forming optical system and the photosensitive material and thereby adjusts a focusing point at the time of the formation of the image of the two-dimensional pattern of the light.

REFERENCES:
patent: 5311362 (1994-05-01), Matsumoto et al.
patent: 5900926 (1999-05-01), Kato
patent: 6251550 (2001-06-01), Ishikawa
patent: 6268904 (2001-07-01), Mori et al.
patent: 05-150175 (1993-06-01), None
patent: 09-197251 (1997-07-01), None
patent: 2001-305663 (2001-11-01), None
patent: WO 02/12961 (2002-02-01), None

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