Projecting apparatus

Details Projecting apparatus Projecting apparatus

1982-05-24

1983-12-13

Haroian, Harry N.

Optics: image projectors

Miscellaneous

353 99, 353101, 355 45, G03B 2734, G03B 2128

Patent

active

044202334

ABSTRACT:
A projecting apparatus for forming an image of a mask on a wafer by a projector of a unit magnification reflection system having a concave spherical mirror and a convex spherical mirror. The distance from the projector to the mask or the upper side of a mask holder for holding the mask and the distance from the projector to the wafer are measured. An error of the image-forming position is computed from the distance measurements. At least one of the mask, the wafer and the projector is moved along the direction of projection in a manner to eliminate the error of the image-forming position computed, thus attaining automatic focus adjustment.

REFERENCES:
patent: 3103850 (1963-09-01), Khoury et al.
patent: 3698808 (1972-10-01), Delmas
patent: 3704657 (1972-12-01), Sliwkowski et al.
patent: 3718396 (1973-02-01), Hennings
patent: 3735686 (1973-05-01), Brewer et al.
patent: 3748015 (1973-07-01), Offner
patent: 3832058 (1974-08-01), Gusovias
patent: 3940209 (1976-02-01), Portner et al.
patent: 3984678 (1976-10-01), Uchiyama et al.

Affiliated with

Also associated with

Rating

Projecting apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projecting apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projecting apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-802287