Projecting and exposing device

Details Projecting and exposing device Projecting and exposing device

1990-12-05

1992-10-27

Ben, Loha

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359821, G02B 2610

Patent

active

051594838

ABSTRACT:
A projecting and exposing device includes a light source and a device for projecting light emitted by the light source to a mask. At least one inverting or erect projecting optical system is provided for projecting an area of a part of the pattern of the mask onto a substrate in the ratio of N to 1. A scanning device moves the projecting optical system in a speed ratio of N:1 so as to scan the mask and expose the substrate to the light coming from a pattern of the mask. A device also moves the mask and the substrate in the speed ratio of N:1.

REFERENCES:
patent: 4844568 (1989-07-01), Suzuki et al.

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