Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Reexamination Certificate
2003-12-09
2009-10-20
Jackson, Jr., Jerome (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Thin active physical layer which is
Heterojunction
C257S021000, C257SE31032, C257SE31122, C977S932000, C430S311000, C430S005000, C359S252000
Reexamination Certificate
active
07605390
ABSTRACT:
Nano-particles are provided with control circuitry to form a programmable mask. The optical characteristics of the nano-particles change to provide patterned light. Such patterned light can be used for example to expose a photoresist on a semiconductor wafer for photolithography.
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Chen Zhiyun
Cooper Gregory D.
Fleet Erin F.
Gönen Serpil
Jackson, Jr. Jerome
Nixon & Vanderhye P.C.
Pixelligent Technologies LLC
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