Programmable mask and method for fabricating biomolecule...

Liquid crystal cells – elements and systems – Liquid crystal system – Liquid crystal for recording or imaging on photosensitive...

Reexamination Certificate

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C349S043000

Reexamination Certificate

active

07362387

ABSTRACT:
A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.

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Biosensore & Bioelectronics 14 (1999), 443-456.

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