Programmable low impedance anti-fuse element

Details Programmable low impedance anti-fuse element Programmable low impedance anti-fuse element

1986-05-09

1989-04-18

Larkins, William D.

357 59, 357 54, 357 71, H01L 2952, H01L 2992, H01L 2710, H01L 2904

Patent

active

048231819

ABSTRACT:
An electrically programmable low impedance circuit element is disclosed having capacitor-like structure with very low leakage before programming and a low resistance after programming. The electrically programmable low impedance circuit element of the present invention includes a lower conductive electrode which may be formed of a metal or semiconductor material, an insulating layer, which, in a preferred embodiment includes a first layer of silicon dioxide, a second layer of silicon nitride and a third layer of silicon dioxide. An upper electrode formed of a metal or of a semiconductor material of the same conductivity type of the lower electrode or a sandwich of both completes the structure.

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