Programmable imprint lithography template

Details Programmable imprint lithography template Programmable imprint lithography template

2006-10-31

2006-10-31

Del Sole, Joseph S. (Department: 1722)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C216S052000, C425S406000

Reexamination Certificate

active

07128559

ABSTRACT:
A template for imprint lithography (IL) that reduces significantly template production costs by allowing the same template to be re-used for several technology generations. The template is composed of an array of spaced-apart moveable and individually addressable rods or plungers. Thus, the template can be configured to provide a desired pattern by programming the array of plungers such that certain of the plungers are in an “up” or actuated configuration. This arrangement of “up” and “down” plungers forms a pattern composed of protruding and recessed features which can then be impressed onto a polymer film coated substrate by applying a pressure to the template impressing the programmed configuration into the polymer film. The pattern impressed into the polymer film will be reproduced on the substrate by subsequent processing.

REFERENCES:
patent: 4687434 (1987-08-01), Beglinger
patent: 5772905 (1998-06-01), Chou
patent: 5993189 (1999-11-01), Mueller et al.
patent: 6280661 (2001-08-01), Takakuwa et al.
patent: 6416311 (2002-07-01), Springer et al.
patent: 6656398 (2003-12-01), Birch et al.

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