Programmable image computer

Data processing: measuring – calibrating – or testing – Measurement system

Reexamination Certificate

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Details

C382S145000

Reexamination Certificate

active

07379838

ABSTRACT:
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.

REFERENCES:
patent: 6509978 (2003-01-01), Szumla
patent: 6707463 (2004-03-01), Gibson et al.
patent: 6862101 (2005-03-01), Miyazaki et al.
patent: 7072058 (2006-07-01), Miyazaki et al.
patent: 7181368 (2007-02-01), Bhaskar et al.

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