Data processing: measuring – calibrating – or testing – Measurement system
Reexamination Certificate
2008-05-27
2008-05-27
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
C382S145000
Reexamination Certificate
active
07379838
ABSTRACT:
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.
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patent: 7181368 (2007-02-01), Bhaskar et al.
Bhaskar Krishnamurthy
Bubna Kishore
Lin Jason Z.
Miller Lawrence R.
Rosengaus Eliezer
Bui Bryan
Kla-Tencor Corporation
Luedeka Neely & Graham P.C.
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