Program for controlling laser apparatus and recording medium...

Details Program for controlling laser apparatus and recording medium... Program for controlling laser apparatus and recording medium...

2006-11-07

2006-11-07

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S028000, C700S104000, C216S065000, C438S463000

Reexamination Certificate

active

07133737

ABSTRACT:
The object of the present invention is to solve problems treatment time when using an SLS method or continuous-oscillation laser. An indispensable portion is scanned with a laser beam in order to crystallize a semiconductor film by driving a laser and so on in accordance with the positions of islands instead of scanning and irradiating the whole semiconductor film. The present invention makes it possible to omit the time for irradiating a portion to be removed through patterning after crystallizing the semiconductor film with a laser beam and greatly shorten the treatment time for one substrate.

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