Profilometer stylus assembly insensitive to vibration

Details Profilometer stylus assembly insensitive to vibration Profilometer stylus assembly insensitive to vibration

1992-10-02

1994-05-10

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

33551, 33558, 335584, G01B 728

Patent

active

053097556

ABSTRACT:
A stylus profilometer having a counterbalanced stylus with a motion transducer using a vane moving between parallel, spaced-apart, conductive plates which damp the motion of the vane by means of trapped air. The vane forms an electrode with the plates so that the combination is a pair of capacitors in a balanced bridge arrangement. Motion of the stylus causes an unbalance of the bridge indicative of the extent of stylus motion. A lever arm associated with the stylus has a tip influenced by a magnetic field which biases the stylus or controls force on a surface to be measured. The entire assembly has a very low moment of inertia to reduce the effects of vibration on the stylus and thereby increase resolution of the device and reduce damage to the substrate.

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Tencor Instruments, "Actual Geometric Considerations of Surface Profilers", Nov. 1983, 3 pages.

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