Profiling complex surface structures using scanning...

Details Profiling complex surface structures using scanning... Profiling complex surface structures using scanning...

2007-06-26

2008-12-16

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

07466429

ABSTRACT:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

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