Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-09-12
2006-09-12
Lee, HWA (Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000
Reexamination Certificate
active
07106454
ABSTRACT:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
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Colonna De Lega Xavier
De Groot Peter J.
Stoner Robert
Fish & Richardson P.C.
Lee HWA (Andrew)
Lyons Michael A.
Zygo Corporation
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