Profiling complex surface structures using height scanning...

Details Profiling complex surface structures using height scanning... Profiling complex surface structures using height scanning...

2007-07-03

2007-07-03

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

11520031

ABSTRACT:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

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