Profile measuring apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

25055922, 33561, 356376, G01B 1100

Patent

active

059171812

ABSTRACT:
A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.

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patent: 5616916 (1997-04-01), Handa et al.
patent: 5659969 (1997-08-01), Butler et al.

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