Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1982-01-11
1983-10-04
Hoffman, James R.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
204192E, 427 39, 430313, 430314, B05D 136, B05D 304
Patent
active
044078501
ABSTRACT:
Anisotropic etching of thick photoresist under plasma conditions to achieve a vertical side wall with or without undercutting is accomplished by operating at a low excitation frequency, a pressure in the range of 0.3 to 2 Torr and a controlled concentration of active species.
REFERENCES:
Moran et al, "High Resolution, Step Profile, Resist Patterns" Bell System Technical Journal, May, Jun. 1979, vol, 58, No, 5, pp. 1027-1036.
Bruce Richard H.
Reinberg Alan R.
Giarratana S. A.
Grimes E. T.
Hoffman James R.
Murphy T. P.
The Perkin-Elmer Corporation
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