Productivity for tool having plurality of processing modules

Details Productivity for tool having plurality of processing modules Productivity for tool having plurality of processing modules

2005-05-09

2008-03-18

Masinick, Michael D. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S104000, C700S108000, C700S109000, C700S110000, C700S182000

Reexamination Certificate

active

07346413

ABSTRACT:
Method, system and program product are disclosed for determining productivity for a tool including a plurality of processing modules. The invention provides an understanding of a relationship between measured variables and overall tool speed by calculating computational components for any empty module, any module speed diversity and any idle tool event, i.e., the potential productivity detractors for the tool. An overall productivity based on each of the computational components may also be determined.

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Connors, D. et al., “Method for Rapid Performance Analysis and Design of Semiconductor Manufacturing Facilities,” IBM Technical Disclosure Bulletin, vol. 36, No. 12, Dec. 1993, pp. 423-424.

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