Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent
1988-08-11
1992-03-31
Spar, Robert J.
Material or article handling
Apparatus for charging a load holding or supporting element...
With simultaneous charging and discharging of plural load...
414416, 220 426, 1983461, 1983474, 1983497, H01L 2168, B65G 1560, B65G 4790
Patent
active
051002760
ABSTRACT:
The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.
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Iwasaki Takemasa
Kikuchi Hiroshi
Ohya Haruo
Shimoyashiro Sadao
Takahashi Tsutomu
Hitachi , Ltd.
Katz Robert S.
Spar Robert J.
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