Production system for wafer

Details Production system for wafer Production system for wafer

2006-01-09

2009-12-29

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Means to convey load back and forth between initial location...

C414S937000

Reexamination Certificate

active

07637708

ABSTRACT:
The system includes a first conveying vehicle for holding and conveying wafers as products finished with an inspection step from a stock storage shelf group11to a reloading device17, and a second conveying vehicle for holding and conveying a transporting container from a reloading device to a transporting storage shelf group: wherein a traveling course of the first conveying vehicle is provided on one side of the reloading device and a traveling course for the second conveying vehicle is provided on the other side; the reloading device includes a first mounting table for mounting the conveying container, a second mounting table for mounting the transporting container, and a reloading device for reloading wafers in the conveying container mounted on the first mounting table to the transporting container mounted on the second mounting table; and the installed number of the first mounting tables is larger than that of the second mounting tables.

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patent: 10-050639 (1998-02-01), None
patent: 2005-085913 (2005-03-01), None
English Language Abstract of JP 10-050639.
English Language Abstract of JP 2005-085913.

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