Production of shaped articles of ultra-pure silicon

Details Production of shaped articles of ultra-pure silicon Production of shaped articles of ultra-pure silicon

1987-12-24

1989-05-23

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

423349, 423350, C23C 1600

Patent

active

048319643

ABSTRACT:
Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon support member, whereby high purity silicon is deposited thereon, and thence recycling the majority of the by-product reaction admixture into said monosilane feedstream.

REFERENCES:
patent: 3091517 (1963-05-01), Short
patent: 3147141 (1964-09-01), Ishizuka
patent: 4132763 (1979-01-01), Schmidt
patent: 4147814 (1979-04-01), Yatsurugi
patent: 4150168 (1979-04-01), Yatsurugi
patent: 4468283 (1984-08-01), Ahmed
Blocher, Proceedings of the 7th International Conf. on CVD, 1979, The Electrochemical Society, Princeton, N.J., pp. 140-158.

Affiliated with

Also associated with

Rating

Production of shaped articles of ultra-pure silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Production of shaped articles of ultra-pure silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Production of shaped articles of ultra-pure silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1722923