Coating processes – Coating by vapor – gas – or smoke
Patent
1985-10-30
1988-03-29
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
423349, 427255, 427314, 427345, C23C 1624
Patent
active
047342978
ABSTRACT:
Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon support member, whereby high purity silicon is deposited thereon, and then recycling the majority of the by-product reaction admixture into said monosilane feedstream.
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Blocher et al., "Survey of Options in a Balanced System for Production of Silicon by Thermal Decomposition of Trichlorosilane", pp. 140-158, TS 695 157 1979.
Boudot Bernard
Jacubert Serge
Nataf Philippe
Childs Sadie L.
Rhone-Poulenc Specialites Chimiques
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