Production of pulsed electron beams

Details Production of pulsed electron beams Production of pulsed electron beams

1987-09-23

1989-06-13

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 250310, 324158D, H01J 37147

Patent

active

048395200

ABSTRACT:
Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then passes a deflecting means (12) on the circle for deflecting the beam in a radial direction at selected locations, before being collected by means (14) for collecting the electron pulses from alternate locations to provide a pulsed electron beam.

REFERENCES:
patent: 4127049 (1978-11-01), Ichigaya
patent: 4439685 (1984-03-01), Plies
patent: 4445041 (1984-04-01), Kelly et al.
patent: 4626690 (1986-12-01), Todokono et al.
patent: 4721909 (1988-01-01), Richardson

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