Production of projection mask

Details Production of projection mask Production of projection mask

1997-01-31

1998-05-26

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430323, G03F 900

Patent

active

057562377

ABSTRACT:
In a process of manufacturing a plurality of projection masks from a substrate at one time, the substrate is subjected only to wet etching on the reverse thereof to form grooves and is separated into the plurality of the projection masks by the use of the grooves formed on the reverse of the substrate.

REFERENCES:
patent: 5468338 (1995-11-01), Shahid

Affiliated with

Also associated with

Rating

Production of projection mask does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Production of projection mask, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Production of projection mask will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1958440