Production of piezoelectric dielectric films by poling in stack

Metal working – Piezoelectric device making

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Details

264 22, 310800, 361225, 361233, H01L 4122

Patent

active

046759590

ABSTRACT:
A multi-layer stack of dielectric films containing at least one piezoelectric-sensitive (PES) film is subjected to a high dc field strength while the stack is maintained at an elevated temperature to induce piezoelectric properties in the PES films. Various stacking arrangements of the films in the multi-layer can be used to obtain enhanced piezoelectric properties for various PES films in the multi-layer stack.

REFERENCES:
patent: 3316620 (1967-05-01), Stewart, Jr.
patent: 3943614 (1976-03-01), Yoshikawa et al.

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