Metal working – Piezoelectric device making
Patent
1985-05-17
1987-06-30
Hall, Carl E.
Metal working
Piezoelectric device making
264 22, 310800, 361225, 361233, H01L 4122
Patent
active
046759590
ABSTRACT:
A multi-layer stack of dielectric films containing at least one piezoelectric-sensitive (PES) film is subjected to a high dc field strength while the stack is maintained at an elevated temperature to induce piezoelectric properties in the PES films. Various stacking arrangements of the films in the multi-layer can be used to obtain enhanced piezoelectric properties for various PES films in the multi-layer stack.
REFERENCES:
patent: 3316620 (1967-05-01), Stewart, Jr.
patent: 3943614 (1976-03-01), Yoshikawa et al.
Hall Carl E.
Pennwalt Corporation
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