Production of photomasks by forming complex of silver and diazon

Details Production of photomasks by forming complex of silver and diazon Production of photomasks by forming complex of silver and diazon

1975-02-18

1977-01-25

Kimlin, Edward C.

Gas separation: apparatus

Electric field separation apparatus

And serially arranged nonelectrical separator

96 36, 96 383, 96 44, 96 84R, 96 84UV, G03C 700, G03C 500

Patent

active

040049256

ABSTRACT:
A photomask comprising a support that is transparent to ultra-violet radiation and visible light and a layer incorporating a photomask image, the image parts of which contain a complex compound of a silver halide and a diazonium, pyrylium, or thiapyrylium salt, wherein said complex compound is substantially opaque to ultra-violet radiation and blue light but substantially transmitting visible light in the wavelength range above 500 nm.

REFERENCES:
patent: 3506442 (1970-04-01), Kerwin et al.
patent: 3567447 (1971-03-01), Chand
patent: 3639125 (1972-02-01), Chand
patent: 3716363 (1973-02-01), Ruggerio

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