Production of phenylarsines

Details Production of phenylarsines Production of phenylarsines

1989-12-27

1991-04-02

Prescott, Arthur C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C07F 966

Patent

active

050048210

ABSTRACT:
Organic metallic compounds in the form of phenylarsines are used in epitaxy processes, such as MO-VPE. MO-CVD or MOMBE processes, as well as for ion implantation or the in-situ doping of polysilicon for semi-conductors.

REFERENCES:
patent: 4734514 (1988-03-01), Hofmann
patent: 4857655 (1989-08-01), Valentine, Jr.
patent: 4900855 (1990-02-01), Hui et al.
Chen et al., "MOVPE Growth of InP Using Isobutylphospine and Tertiary Butylphosphine", Journal of Crystal Growth (77), 1986, pp. 11-18.
Chen et al., "Use of Tertiary Butylarsine for GaAs Growth", Applied Physics Lett. 50(4), Jan. 26, 1983, pp. 218-220.
Chen et al., "Organometallic VPE Growth of InP Using Phosphorus Sources", Applied Physics Lett. 48, Jan. 2, 1986 (22), pp. 1531-1533.
Lum et al., "Use of Tert-Butylarsine in MOCVD of GaAs Growth", Applid Physics Letter, 50(5), Feb. 2, 1987, pp. 284-286.

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