Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1990-05-04
1991-06-04
Langel, Wayne A.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
423284, 423344, 423409, 423411, 423412, C01B 2106, C01B 21068, C01B 21076, C01B 3514
Patent
active
050211340
ABSTRACT:
A method for the production of a nitride of zirconium, hafnium, silicon, germanium, tin, lead, boron, aluminium, gallium, indium or thallium either alone or as mixtures is claimed. Ammonia and a halide of at least one of these elements are heated by means of a direct electric current plasma in a non-oxidizing gas in a reactor in which recirculation is induced such that the defined recirculation ratio is greater than 2.5 and preferably greater than 4.0. Any titanium halide present shall be less then 40% by weight of mixed halides.
REFERENCES:
patent: 2952599 (1960-09-01), Suchet
patent: 3345134 (1967-10-01), Heymer et al.
patent: 4022872 (1977-05-01), Carson et al.
Blackburn Stephen R.
Jones Anthony G.
Langel Wayne A.
Tioxide Group PLC
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