Radiant energy – Ion generation – Methods
Patent
1991-10-11
1993-03-30
Anderson, Bruce C.
Radiant energy
Ion generation
Methods
250423R, 3133601, H01J 3708
Patent
active
051986779
ABSTRACT:
A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.
REFERENCES:
patent: 4233537 (1980-11-01), Limpaecher
patent: 4447732 (1984-05-01), Leung et al.
patent: 4486665 (1984-12-01), Leung et al.
patent: 4529571 (1985-07-01), Bacon et al.
patent: 4661710 (1987-04-01), Verney et al.
patent: 4739169 (1988-04-01), Kurosawa et al.
patent: 4793961 (1988-12-01), Ehlers
patent: 4847476 (1989-07-01), Sato et al.
S. R. Walther et al., "Production of Atomic and Molecular Nitrogen Ion Beams Using a Multicusp and Microwave Ion Source", J. Appl. Phys., 63(12), 15 Jun. 1988, pp. 5678-5682.
K. N. Leung et al., "Small Multicusp H-Source", Rev. Sci. Instrum. 59 (3), Mar. 1988, pp. 453-456.
K. N. Leung et al., "Optimatization of H Production from a Multicusp Ion Source", Rev. Sci. Instrum. 60(4), Apr. 1989, pp. 531-538.
Kunkel Wulf B.
Leung Ka-Ngo
Walther Steven R.
Anderson Bruce C.
Gaither Roger S.
Moser William R.
The United States of America as represented by the United States
Valdes Miguel A.
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