Production of large resonant plasma volumes in microwave electro

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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31511121, 31511131, H05H 100

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058412379

ABSTRACT:
Microwave injection methods for enhancing the performance of existing electron cyclotron resonance (ECR) ion sources. The methods are based on the use of high-power diverse frequency microwaves, including variable-frequency, multiple-discrete-frequency, and broadband microwaves. The methods effect large resonant "volume" ECR regions in the ion sources. The creation of these large ECR plasma volumes permits coupling of more microwave power into the plasma, resulting in the heating of a much larger electron population to higher energies, the effect of which is to produce higher charge state distributions and much higher intensities within a particular charge state than possible in present ECR ion sources.

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R. A. Dandl et al "Electron Cyclotron Heated `Target` Plasma Experiments," Plasma Phys. Controlled Nucl. Res., (1969), Proc. Intl. Conf., 3rd, Novosibirsk, 435-448.
G. D. Alton et al "Design Studies for an Advanced ECR Ion Source," Rev. Sci. Instrum., 65 (4) Apr. 1994, 775-787.
Z. Q. Xie and C. M. Lyneis, "Improvements on the LBL AECR Source," Proceedings of Twelfth Intl. Workshop on ECR Ion Sources, edited by M. Sekiguchi and T. Nakagawa, The Inst. of Physical and Chemical Res. (RIKEN) Apr. 25-27, 1995 Wakoshi, Japan, INS-J-1821995, pp. 24-28.).

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