Production of focused ion cluster beams

Details Production of focused ion cluster beams Production of focused ion cluster beams

1989-06-08

1991-05-28

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

250423F, 250424, 250427, 2504922, 250396R, 250281, 250282, H01J 4900

Patent

active

050197126

ABSTRACT:
An ion cluster beam can be focused and delivered to a target with a selected energy range by directing the ionized beam through a beam crossover, and furnishing an energy-selecting apertured plate adjacent to the beam crossover so that the center of the beam passes through the aperture. The beam crossover is distributed along the beam axis due to the different energies of the particles in the beam. The apertured plate in the beam path removes from the beam those clusters having energies lower than and/or greater than an acceptable energy range, depending upon its placement and diameter, to provide energy selectivity. The portion of the beam passing through the aperture is imaged upon the target by a lens, and the beam may be deflected by deflector coils to write patterns across the surface of the target.

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