Production of electronic device

Details Production of electronic device Production of electronic device

1997-10-22

2000-02-08

Utech, Benjamin

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

438 30, 438751, 438756, 438757, 216 23, 216 27, 216 51, 216 95, H01L 21302, C30B 3300, H01B 1300

Patent

active

060227516

ABSTRACT:
A process for producing an electronic device having a silicon nitride film on a substrate is provided which comprises steps of forming a silicon nitride film and a silicon oxide film on a first face and a second face reverse to the first face of the substrate respectively, removing the silicon oxide film on the first face by wet etching, removing the silicon nitride film on the first face by wet etching, and removing the silicon oxide film on the second face by wet etching.

REFERENCES:
patent: 3479237 (1969-11-01), Bergh et al.
patent: 3675314 (1972-07-01), Levi
patent: 3899363 (1975-08-01), Dennard et al.
patent: 4092211 (1978-05-01), Morris
patent: 5181132 (1993-01-01), Shindo et al.
patent: 5658471 (1997-08-01), Murthy et al.

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