Production of electronic coatings by spin coating a partially fl

Details Production of electronic coatings by spin coating a partially fl Production of electronic coatings by spin coating a partially fl

1988-10-11

1991-03-05

Hearn, Brian E.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Processes of preparing a desired or intentional composition...

524600, 437225, 437228, 437229, 437231, 148DIG137, 4273855, 528184, 528188, 528352, 528353, H01L 2100, H01L 2102, G03C 168

Patent

active

049978691

ABSTRACT:
In humid atmospheres (e.g., 40% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyimides tend to be unstable in the sense that during spin coating operations undesirable precipitate formation occurs on the rotating surface of the wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described are solutions of these polyimide polymers in a solvent containing one or more liquid aromatic hydrocarbons having a boiling point of at least about 110.degree. C. and one or more dipolar aprotic solvents having a boiling point of at least about 150.degree. C., such that the solution (a) contains on a weight basis from about 5% to about 50% of the polyimide, and (b) does not undergo precipitate formation during spin coating in an atmosphere of at least up to about 55% relative humidity.

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