Production of electronic coatings by spin coating a partially fl

Details Production of electronic coatings by spin coating a partially fl Production of electronic coatings by spin coating a partially fl

1988-10-11

1991-02-26

Hearn, Brian E.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Processes of preparing a desired or intentional composition...

524360, 524600, 528128, 528188, 528352, 528353, 437229, 437231, C08G 6932, C08G 7310, C08G 7312

Patent

active

049962540

ABSTRACT:
In human atmospheres (e.g., 55% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymers tend to be unstable in the sense that during spin coating operations undesirable precipitate formation may occur on the rotating surface of a semiconductor wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described are solutions of these polyamic acid polymers in a solvent containing one or more cycloaliphatic ketones, such that the solution (a) contains on a weight basis from about 5% to about 40% of the polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.

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