Production of cavities filled with a fluid material in an...

Details Production of cavities filled with a fluid material in an... Production of cavities filled with a fluid material in an...

2008-01-10

2010-06-01

Martinez, Joseph (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S272000, C359S247000, C359S296000

Reexamination Certificate

active

07729033

ABSTRACT:
A device including: a first layer of material; a second layer of material disposed as a sealing layer; walls disposed to interconnect the first layer and second layer, wherein cavities are formed by the first layer, the second layer, and the walls; a fluid at least partially filling the cavities; and blocks integrally connected to the first layer of material, and defining housings filled at least partially with the material of the second layer and not including any of the fluid.

REFERENCES:
patent: 3863249 (1975-01-01), Olah
patent: 6947202 (2005-09-01), Liang et al.
patent: 7136216 (2006-11-01), Daniel et al.
patent: 1 672 394 (2006-06-01), None
patent: 2 879 757 (2006-06-01), None
patent: 2 897 164 (2007-08-01), None
patent: WO 02/088671 (2002-11-01), None
patent: WO 03/021346 (2003-03-01), None
patent: WO 2006/067309 (2006-06-01), None
patent: WO 2006/067650 (2006-06-01), None
patent: WO 2006/116616 (2006-11-01), None
patent: WO 2007/090828 (2007-08-01), None
Matthieu Liger, et al., “Robust Parylene-To-Silicon Mechanical Anchoring”, MEMS-03, IEEE, Micro Electro Mechanical Systems, the Sixteenth Annual International Conference, Jan. 19-23, 2003, pp. 602-605.

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