Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From organic oxygen-containing reactant
Patent
1999-10-26
2000-10-17
Acquah, Samuel A.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From organic oxygen-containing reactant
528 86, 528392, 524742, 524745, C08G 6534, C08J 513
Patent
active
06133412&
ABSTRACT:
The present invention provides a process for generating mixed acetal polymers by reacting a hydroxyl containing polymer or monomer with vinyl ether and alcohol in the presence of an acid catalyst. The process of this invention provides a new class of polymers based on mixed acetals which are prepared in-situ with one reaction. The mixed acetal polymers are inexpensive to synthesize and readily reproducible. The resulting mixed acetal polymer is blended with a photoacid generator and dissolved in a solvent to produce a chemically amplified resist composition. A process for forming a pattern comprises the steps of providing the chemically amplified resist composition, coating a substrate with the resist composition, imagewise exposing the resist coated substrate to actinic radiation, and forming a resist image by developing the resist coated substrate.
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Blakeney Andrew J.
Ferreira Lawrence
Malik Sanjay
Maxwell Brian E.
Sizensky Joseph J.
Acquah Samuel A.
Arch Chemicals Inc.
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