Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1990-10-15
1992-01-07
Arbes, Carl J.
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
29599, 20419211, 20419229, 20419231, 427 38, 118723, B05D 512, C23C 1400
Patent
active
050792245
ABSTRACT:
The superconductive thin film is made in the procedures that; in a vacuum vessel having an internal pressure maintained at least lower than 10.sup.-2 torr, each metal of the component elements of the superconductive thin film to be made is charged into a crucible so as to be heated as a simple substance respectively so that the evaporated metallic element is spouted from the crucible as a cluster beam, the spouted evaporation metallic element is ionized and accelerated through an electric field, impinging to a substrate while spouting oxygen gas toward the substrate, controlling the heating of the crucible so that the amount of the respective metallic evaporation beams is made to be a predetermined mole ratio, whereby the superconductive thin film is formed on the substrate.
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Arbes Carl J.
Sumitomo Electric Industries Ltd.
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